Category:
Advanced Intermediates
CAS NO:
4270-70-6
Standard:
ChP,USP,EP,
Product Name: Triphenylsulfoniumchloride
CAS: 4270-70-6
Triphenylsulfonium chloride (CAS: 1647-29-8, Formula: C18H15ClS) is a quaternary sulfonium salt widely utilized in photoresist formulations. It serves as a critical photoinitiator in semiconductor lithography, generating strong acids upon UV exposure to drive polymerization or cross-linking processes.
Store in a cool, dry place away from light and moisture. Handle with appropriate PPE including gloves and eye protection due to potential irritant properties. Avoid inhalation of dust and ensure adequate ventilation during processing.